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Go To Patent View Page     13 Related Patents for 7165233 PDF Patent ID Title Date Filed N/A 7115935 Embedded DRAM for metal-insulator-metal (MIM) capacitor structure April 9, 2004 N/A 7078291 Method for fabricating a deep trench capacitor December 2, 2003 N/A 7014965 Photolithography method for reducing effects of lens aberration August 13, 2003 N/A 6960503 Method for fabricating a trench capacitor November 16, 2003 N/A 6880135 Method of incorporating lens aberration information into various process flows November 7, 2001 N/A 6720232 Method of fabricating an embedded DRAM for metal-insulator-metal (MIM) capacitor structure April 10, 2003 N/A 6553562 Method and apparatus for generating masks utilized in conjunction with dipole illumination techniques November 5, 2001 N/A 6498364 Capacitor for integration with copper damascene processes January 21, 2000 N/A 6489646 DRAM cells with buried trench capacitors January 23, 2002 N/A 6437858 Aberration measuring method, aberration measuring system and aberration measuring mask September 22, 2000 N/A 6163376 Alignment apparatus, aberration measuring method and aberration measuring mark October 7, 1999 N/A 5220403 Apparatus and a method for high numerical aperture microscopic examination of materials September 30, 1992 N/A 5208648 Apparatus and a method for high numerical aperture microscopic examination of materials March 11, 1991

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