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Your search returned 901 patents.
( 716/19 in Current US Classification )
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Patent IDTitleDate Filed
7181707 Method of setting process parameter and method of setting process parameter and/or design rule March 12, 2003
7178128 Alternating phase shift mask design conflict resolution October 15, 2002
7178127 Method for time-evolving rectilinear contours representing photo masks August 22, 2005
7175952 Method of generating mask distortion data, exposure method and method of producing semiconductor device May 19, 2004
7175940 Method of two dimensional feature model calibration and optimization October 9, 2002
7174532 Method of making a semiconductor device by balancing shallow trench isolation stress and optical proximity effects November 18, 2004
7174531 Creating photolithographic masks March 26, 2004
7171645 Semiconductor device, method of generating pattern for semiconductor device, method of manufacturing semiconductor device and device of generating pattern used for semiconductor device August 6, 2003
7171637 Translation generation for a mask pattern January 14, 2005
7169515 Phase conflict resolution for photolithographic masks April 29, 2004
7167811 Methods and apparatus for data analysis February 14, 2003
7167768 Board work system having provision for establishing operating environment suitable for operator, and process of establishing the suitable operating environment July 29, 2002
7165235 Exposure pattern forming method and exposure pattern April 8, 2005
7165233 Test ket layout for precisely monitoring 3-foil lens aberration effects April 12, 2004
7159205 Use of non-lithographic shrink techniques for fabrication/making of imprints masks May 4, 2004
7159197 Shape-based geometry engine to perform smoothing and other layout beautification operations December 31, 2001
7155699 Streamlined IC mask layout optical and process correction through correction reuse May 7, 2004
7155698 Method of locating areas in an image such as a photo mask layout that are sensitive to residual processing effects November 17, 2003
7155689 Design-manufacturing interface via a unified model October 7, 2003
7152219 Reference image generation from subject image for photolithography mask analysis December 10, 2002
7149999 Method for correcting a mask design layout February 25, 2004
7149998 Lithography process modeling of asymmetric patterns December 30, 2002
7147976 Binary OPC for assist feature layout optimization October 17, 2005
7146599 Method for using asymmetric OPC structures on line ends of semiconductor pattern layers April 15, 2004
7146597 CAD method for arranging via-holes, a CAD tool, photomasks produced by the CAD method, a semiconductor integrated circuit manufactured with photomasks and a computer program product for executing the CAD method September 27, 2004
7143389 Systems and methods for generating node level bypass capacitor models July 28, 2004
7143329 FPGA configuration memory with built-in error correction mechanism March 9, 2004
7139998 Photomask designing method, pattern predicting method and computer program product September 30, 2003
7139997 Method and system for checking operation of a mask generation algorithm May 11, 2004
7139996 Mask pattern correction apparatus and mask pattern correction method and mask preparation method and method of production of a semiconductor device December 19, 2002
7137098 Pattern component analysis and manipulation August 27, 2004
7137096 Interconnect structure of a chip and a configuration method thereof March 10, 2004
7137092 Layout method of semiconductor integrated circuit, layout structure thereof, and photomask for forming the layout structure August 10, 2004
7132203 Phase shift masking for complex patterns with proximity adjustments April 6, 2004
7131106 Integrated circuit pattern designing method, exposure mask manufacturing method, exposure mask, and integrated circuit device manufacturing method November 7, 2003
7131105 System and method for automatic mesh generation from a system-level MEMS design September 19, 2003
7131104 Fast and accurate optical proximity correction engine for incorporating long range flare effects May 13, 2004
7131103 Conductor stack shifting March 4, 2004
7131102 Full sized scattering bar alt-PSM technique for IC manufacturing in sub-resolution era February 19, 2004
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