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Your search returned 386 patents.
( 700/29 in Current US Classification )
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Patent IDTitleDate Filed
6993177 Gauging based on global alignment and sub-models November 2, 2001
6992767 Management system, apparatus, and method, exposure apparatus, and control method therefor April 28, 2003
6988017 Adaptive sampling method for improved control in semiconductor manufacturing March 8, 2005
6985809 Control apparatus, control method, and engine control unit July 25, 2002
6985781 Residual activation neural network January 8, 2002
6983230 Method and apparatus for simulating a radiation dose delivered to an object September 11, 2001
6983186 Computer method and apparatus for vessel selection and optimization September 7, 2001
6978272 Method and apparatus for displaying instrumentation parameters in a database system November 29, 1999
6975916 Method and system for determining the best integral process path to process semiconductor products to improve yield July 9, 2001
6972952 Computer system and control method thereof October 6, 2003
6970857 Intelligent control for process optimization and parts maintenance September 5, 2003
6968258 Residual feedback to improve estimator prediction May 31, 2002
6965848 Ducting system designer December 12, 2000
6965803 Apparatus and method for commissioning and diagnosing control systems November 20, 2001
6965800 System of measurements experts and method for generating high-performance measurements software drivers November 13, 2001
6962164 System and method for a mass flow controller April 24, 2002
6961634 System and method for allocating multi-function resources for a wetdeck process in semiconductor wafer fabrication May 28, 2003
6959225 Graphical user interface for allocating multi-function resources in semiconductor wafer fabrication and method of operation May 28, 2003
6959224 Probability constrained optimization for electrical fabrication control January 2, 2003
6959218 Partitioned control system and method February 27, 2004
6957202 Model selection for decision support systems May 26, 2001
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