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Your search returned 1352 patents.
( 700/121 in Current US Classification )
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Patent IDTitleDate Filed
7213478 Method for automatic configuration of processing system February 12, 2004
7212878 Wafer-to-wafer control using virtual modules August 27, 2004
7209799 Predictive modeling of machining line variation April 14, 2005
7209798 Iso/nested cascading trim control with model feedback updates September 20, 2004
7206721 Methods and systems of offline measurement for process tool monitoring December 12, 2005
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