| 1 2 3 4 5 |
| Patent ID | Title | Date Filed |
| 7079912 | System and method for high speed control and rejection
| November 25, 2002 |
| 7076320 | Scatterometry monitor in cluster process tool environment for advanced process control (APC)
| May 4, 2004 |
| 7069103 | Controlling cumulative wafer effects
| June 28, 2002 |
| 7069099 | Method of transporting and processing substrates in substrate processing apparatus
| January 30, 2004 |
| 7065725 | Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus
| March 4, 2003 |
| 7065460 | Apparatus and method for inspecting semiconductor device
| September 16, 2004 |
| 7065425 | Metrology tool error log analysis methodology and system
| June 22, 2005 |
| 7065419 | Job flow Petri Net and controlling mechanism for parallel processing
| April 14, 2004 |
| 7062411 | Method for process control of semiconductor manufacturing equipment
| March 2, 2004 |
| 7062343 | Remote maintenance system
| April 29, 2005 |
| 7058469 | System and method for fully automatic manufacturing control in a furnace area of a semiconductor foundry
| June 24, 2004 |
| 7058467 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus
| November 15, 2004 |
| 7058458 | Power controller
| March 22, 2002 |
| 7050922 | Method for optimizing test order, and machine-readable media storing sequences of instructions to perform same
| January 14, 2005 |
| 7050875 | System and method for detecting an anomalous condition
| July 1, 2003 |
| 7047469 | Method for automatically searching for and sorting failure signatures of wafers
| March 16, 2001 |
| 7047097 | High performance controller for shifting resonance in micro-electro-mechanical systems (MEMS) devices
| December 9, 2002 |
| 7047090 | Method to obtain improved performance by automatic adjustment of computer system parameters
| June 18, 2003 |
| 7043321 | Exception handling in manufacturing systems combining on-line planning and predetermined rules
| May 27, 2004 |
| 7039485 | Systems and methods enabling automated return to and/or repair of defects with a material placement machine
| March 12, 2004 |
| 7028226 | Method for controlling machines and an information system for operating a machine
| April 7, 2001 |
| 7027943 | Method, device, computer-readable storage medium and computer program element for the computer-aided monitoring of a process parameter of a manufacturing process of a physical object
| November 12, 2003 |
| 7027638 | Wafer color variation correcting method, selective wafer defect detecting method, and computer readable recording media for the same
| September 7, 2001 |
| 7024746 | Method and apparatus for monitoring blind fastener setting
| July 14, 2003 |
| 7020536 | Method of building a defect database
| February 6, 2004 |
| 7020535 | Method and apparatus for providing excitation for a process controller
| November 6, 2003 |
| 7020323 | Pattern defect inspection apparatus and method
| March 28, 2002 |
| 7013192 | Substrate contact analysis
| June 14, 2004 |
| 7010376 | Diagnostic for poorly tuned control loops
| October 24, 2003 |
| 7010374 | Method for controlling semiconductor processing apparatus
| March 4, 2003 |
| 7010366 | Field device with display
| July 5, 2002 |
| 7006948 | Diagnostic method for manufacturing processes
| November 23, 2004 |
| 7006886 | Detection of spatially repeating signatures
| January 12, 2004 |
| 7006878 | Computer-implemented method for analyzing a problem statement based on an integration of Six Sigma, Lean Manufacturing, and Kaizen analysis techniques
| February 5, 2004 |
| 7006877 | Method for automatically recording an intervention in a production facility
| August 23, 2004 |
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