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Your search returned 577 patents.
( 700/108 in Current US Classification )
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Patent IDTitleDate Filed
7103444 Method and apparatus for supervising manufacturing tools April 28, 2005
7103437 Work data collection method April 2, 2001
7099733 Semiconductor production system July 12, 2004
7096086 Apparatus, method and program for generating a recipe for an inspection tool September 23, 2005
7096085 Process control by distinguishing a white noise component of a process variance May 28, 2004
7096082 Design control document linking template September 16, 2003
7092794 Method and apparatus for connecting to HVAC device October 5, 2000
7092777 Intelligent agent system and method for evaluating data integrity in process information databases October 28, 2005
7089077 Monitor wafer purchase and controls database July 6, 2005
7085619 Method for controlling an industrial process January 16, 2003
7085615 Dynamic on-line optimization of production processes June 12, 2003
7079911 Method and system for automatically isolating suspect items in a manufacturing or assembly environment November 26, 2003
7076320 Scatterometry monitor in cluster process tool environment for advanced process control (APC) May 4, 2004
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