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Your search returned 1247 patents.
( 438/624 in Current US Classification )
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Patent IDTitleDate Filed
7060619 Reduction of the shear stress in copper via's in organic interlayer dielectric material March 4, 2003
7060605 Methods for making dual-damascene dielectric structures February 16, 2001
7060554 PECVD silicon-rich oxide layer for reduced UV charging July 11, 2003
7056825 Method for manufacturing a semiconductor device that includes plasma treating an insulating film with a mixture of helium and argon gases May 28, 2004
7056823 Backend metallization method and device obtained therefrom January 11, 2005
7052971 Method for manufacturing semiconductor device July 12, 2002
7049211 In-situ-etch-assisted HDP deposition using SiF.sub.4 March 25, 2005
7049153 Polymer-based ferroelectric memory April 23, 2003
7045453 Very low effective dielectric constant interconnect structures and methods for fabricating the same April 12, 2005
7045372 Apparatus and method for forming a battery in an integrated circuit August 2, 2003
7041586 Semiconductor device having a multilayer interconnection structure March 26, 2002
7041574 Composite intermetal dielectric structure including low-k dielectric material July 19, 2004
7041534 Semiconductor chip package and method for making the same August 26, 2004
7037851 Methods for selective integration of airgaps and devices made by such methods September 30, 2004
7037823 Method to reduce silanol and improve barrier properties in low k dielectric ic interconnects July 27, 2004
7037822 Method of forming metal line in semiconductor device December 10, 2003
7034400 Dual damascene interconnect structure using low stress fluorosilicate insulator with copper conductors September 10, 2003
7034380 Low-dielectric constant structure with a multilayer stack of thin films with pores September 12, 2003
7033908 Methods of forming integrated circuit devices including insulation layers February 10, 2004
7030005 Method of manufacturing semiconductor device December 30, 2004
7026234 Parasitic capacitance-preventing dummy solder bump structure and method of making the same June 8, 2004
7023093 Very low effective dielectric constant interconnect Structures and methods for fabricating the same October 24, 2002
7023091 Semiconductor integrated circuit device June 20, 2003
7022602 Nitrogen-enriched low-k barrier layer for a copper metallization layer November 19, 2003
7015133 Dual damascene structure formed of low-k dielectric materials April 14, 2004
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