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Your search returned 96 patents.
( 438/392 in Current US Classification ) |
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| Patent ID | Title | Date Filed |
| 5429978 | Method of forming a high density self-aligned stack in trench
| June 22, 1994 |
| 5354710 | Method of manufacturing semiconductor devices using an adsorption enhancement layer
| February 12, 1993 |
| 5348905 | Method of making diffused buried plate trench DRAM cell array
| August 26, 1993 |
| 5066609 | Method of manufacturing a semiconductor device including a trench capacitor
| January 23, 1990 |
| 4999312 | Doping method using an oxide film and a nitride film on the trench wall to manufacture a semiconductor device and the manufactured device
| August 16, 1989 |
| 4994409 | Method for manufacturing a trench capacitor using a photoresist etch back process
| July 18, 1989 |
| 4971926 | Method of manufacturing a semiconductor device
| December 16, 1988 |
| 4945069 | Organic space holder for trench processing
| December 16, 1988 |
| 4889492 | High capacitance trench capacitor and well extension process
| May 7, 1986 |
| 4859622 | Method of making a trench capacitor for dram
| August 2, 1988 |
| 4833094 | Method of making a dynamic ram cell having shared trench storage capacitor with sidewall-defined bridge contacts and gate electrodes
| August 29, 1988 |
| 4782036 | Process for producing a predetermined doping in side walls and bases of trenches etched into semiconductor substrates
| July 16, 1987 |
| 4676847 | Controlled boron doping of silicon
| April 29, 1986 |
| 4604150 | Controlled boron doping of silicon
| January 25, 1985 |
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