|
| | |
|
Your search returned 692 patents.
( 430/396 in Current US Classification ) |
|
|
| 1 2 3 4 5 6 7 |
| Patent ID | Title | Date Filed |
| 6855486 | Lithographic method and apparatus
| September 28, 2000 |
| 6849393 | Phase shifting lithographic process
| February 14, 2003 |
| 6846617 | Facilitating optical proximity effect correction through pupil filtering
| May 15, 2002 |
| 6844118 | Method and layout for high density reticle
| June 21, 2002 |
| 6841340 | Optical fabricating method and apparatus
| July 12, 2002 |
| 6841338 | Photoresist composition and method of forming a photoresist pattern with a controlled remnant ratio
| June 17, 2002 |
| 6828085 | Exposure method and device manufacturing method using the same
| September 7, 1999 |
| 6828080 | Pattern forming method and method of fabricating device
| April 23, 2002 |
| 6824958 | Method of manufacturing photomask and method of manufacturing semiconductor integrated circuit device
| December 26, 2001 |
| 6824728 | Electron beam crosslinking of polyacrylates
| February 20, 2001 |
| 6818389 | Method of design and fabrication of integrated circuits using regular arrays and gratings
| September 13, 2001 |
| 6818361 | Photomasking
| March 13, 2003 |
| 6815148 | Method of manufacturing a semiconductor device and designing a mask pattern
| June 18, 2002 |
| 6811954 | Semiconductor integrated circuit device and method of manufacturing the same, and method of manufacturing masks
| June 14, 2002 |
| 6811953 | Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice
| May 22, 2001 |
| 6808868 | Method for manufacturing a substrate for a display panel
| December 18, 2003 |
| 6808867 | Photo-definable self-assembled materials
| March 19, 2002 |
| 6803178 | Two mask photoresist exposure pattern for dense and isolated regions
| June 25, 2001 |
| 6803161 | Framed pellicle for protection of photolithographic photomask
| April 22, 2003 |
| 6803158 | Photomask and method for forming an opaque border on the same
| March 27, 2002 |
| 6800428 | Wavelength-independent exposure pattern generation method and exposure pattern generation system for lithography
| April 29, 2002 |
| 6800421 | Method of fabrication of semiconductor integrated circuit device
| November 30, 2001 |
| 6799365 | Process of manufacturing a disc drive slider with bar reducing load/unload damage
| June 25, 2002 |
| 6794118 | Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process
| August 7, 2001 |
| 6790599 | Microfluidic devices and manufacture thereof
| July 13, 2000 |
| 6790598 | Methods of patterning resists and structures including the patterned resists
| January 16, 2002 |
| 6787270 | Photo mask for patterning a lightning rod
| June 29, 2001 |
| 6785009 | Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same
| February 28, 2002 |
| 6780574 | Multiple exposure method
| March 2, 2001 |
| 6780572 | Optical lithography
| May 31, 2002 |
| 6780568 | Phase-shift photomask for patterning high density features
| April 30, 2002 |
| 6777168 | Multiple photolithographic exposures with different clear patterns
| December 4, 2001 |
| 6774985 | Stent manufacturing apparatus
| February 10, 2003 |
| 6773870 | Process of manufacturing a diffusive direct reflector using gray tone exposure
| May 8, 2002 |
| 6770412 | Black and white photographic material
| June 24, 2002 |
| 6767674 | Method for obtaining elliptical and rounded shapes using beam shaping
| October 26, 2001 |
| 1 2 3 4 5 6 7 |
|
|
|
|
|
|
|
|
|
|
|