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Your search returned 846 patents.
( 430/394 in Current US Classification ) |
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| Patent ID | Title | Date Filed |
| 6924069 | Method for repairing attenuated phase shift masks
| January 15, 2003 |
| 6913872 | Dual-wavelength exposure for reduction of implant shadowing
| September 30, 2002 |
| 6913858 | Photomask for measuring lens aberration, method of manufacturing the same, and method of measuring lens aberration
| February 20, 2003 |
| 6911301 | Methods of forming aligned structures with radiation-sensitive material
| March 24, 2004 |
| 6905802 | Multiple exposure method for forming a patterned photoresist layer
| August 9, 2003 |
| 6902851 | Method for using phase-shifting mask
| January 16, 2002 |
| 6897010 | Method of recording identifier and set of photomasks
| August 28, 2002 |
| 6897007 | Method for forming image
| March 18, 2002 |
| 6893806 | Multiple purpose reticle layout for selective printing of test circuits
| August 15, 2002 |
| 6881524 | Photolithography method including a double exposure/double bake
| November 27, 2002 |
| 6879376 | Method and apparatus for exposing photoresists using programmable masks
| November 18, 2002 |
| 6872510 | Photomask having small pitch images of openings for fabricating openings in a semiconductor memory device and a photolithographic method for fabricating the same
| March 19, 2003 |
| 6872507 | Radiation correction method for electron beam lithography
| November 1, 2002 |
| 6869751 | Method of manufacturing metal electrode
| July 16, 2001 |
| 6869750 | Structure and method for forming a multilayered structure
| April 19, 2002 |
| 6866989 | Method for forming patterned insulating elements and methods for making electron source and image display device
| September 6, 2002 |
| 6866971 | Full phase shifting mask in damascene process
| November 14, 2002 |
| 6861182 | Tri-tone attenuated phase shift trim mask for double exposure alternating phase shift mask process
| October 17, 2002 |
| 6861180 | Contact printing as second exposure of double exposure attenuated phase shift mask process
| September 10, 2002 |
| 6861178 | Phase shift mask, method of exposure, and method of producing semiconductor device
| May 23, 2002 |
| 6861176 | Hole forming by cross-shape image exposure
| September 9, 2002 |
| 6858356 | Method of generating large scale signal paths in a parallel processing system
| December 20, 2002 |
| 6858355 | Mask and method for defining a guard ring pattern
| December 13, 2002 |
| 6856029 | Process independent alignment marks
| June 22, 2001 |
| 6855486 | Lithographic method and apparatus
| September 28, 2000 |
| 6855464 | Grating test patterns and methods for overlay metrology
| December 17, 2003 |
| 6852475 | Method for making a forming structure
| March 14, 2003 |
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