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| Patent ID | Title | Date Filed |
| 7125645 | Composite photoresist for pattern transferring
| April 10, 2002 |
| 7122297 | Photosensitive resin composition, resist composition, fabrication method for patterned substrate, and device
| September 17, 2004 |
| 7115532 | Methods of forming patterned photoresist layers over semiconductor substrates
| September 5, 2003 |
| 7115523 | Method and apparatus for etching photomasks
| March 18, 2003 |
| 7107668 | Method of manufacturing a longitudinal microsolenoid
| April 2, 2004 |
| 7105279 | Method for fabricating a patterned layer on a semiconductor substrate
| April 28, 2003 |
| 7105099 | Method of reducing pattern pitch in integrated circuits
| July 14, 2004 |
| 7090965 | Method for enhancing adhesion between reworked photoresist and underlying oxynitride film
| July 1, 2003 |
| 7090783 | Lithography-based patterning of layer-by-layer nano-assembled thin films
| March 13, 2003 |
| 7089651 | Process of manufacturing coil layers using a novel combination of photoexposure and thermal curing to achieve shape control of a photoresist material
| October 5, 2001 |
| 7087356 | 193nm resist with improved post-exposure properties
| September 30, 2002 |
| 7083903 | Methods of etching photoresist on substrates
| June 17, 2003 |
| 7083897 | Method of fabricating a poly fuse
| May 15, 2003 |
| 7081417 | Manufacturing method for electronic device and multiple layer circuits thereof
| June 24, 2004 |
| 7081327 | Chemically amplified positive photoresist composition for thick film, thick-film photoresist laminated product, manufacturing method for thick-film resist pattern, and manufacturing method for connection terminal
| December 29, 2004 |
| 7081326 | Negative photoresist and method of using thereof
| March 11, 2004 |
| 7078151 | Photosensitive element, method for forming resist pattern, and method for manufacturing printed wiring board
| September 20, 2001 |
| 7077974 | Fine-dimension masks and related processes
| May 30, 2003 |
| 7074652 | Method for separating sapphire wafer into chips
| March 23, 2004 |
| 7074341 | Method for protecting surface of stamper/imprinter during manufacture thereof
| June 25, 2003 |
| 7070914 | Process for producing an image using a first minimum bottom antireflective coating composition
| January 9, 2002 |
| 7070911 | Structure and method for reducing standing waves in a photoresist
| January 23, 2003 |
| 7070910 | Silazane compound amd methods for using the same
| January 12, 2005 |
| 7070908 | Feature formation in thick-film inks
| April 14, 2003 |
| 7070907 | Substrate having character/symbol section and processing method of character/symbol section
| September 5, 2002 |
| 7070905 | Pattern forming process
| September 10, 2004 |
| 7067235 | Bi-layer photoresist dry development and reactive ion etch method
| January 15, 2002 |
| 7067228 | Photosensitive resin composition, photosensitive element employing it, resist pattern forming method, and printed wiring board fabrication method
| June 22, 2001 |
| 7063932 | Resist resin
| September 10, 2004 |
| 7060152 | Method of fabricating electrode of plasma display panel using photo-peeling method
| September 9, 2003 |
| 7056647 | Flash memory with reduced source resistance and fabrication method thereof
| December 30, 2003 |
| 7056446 | Method of manufacturing nano-gap electrode
| September 16, 2003 |
| 7052825 | Substrate having fine lines, method for manufacturing the same, electron-source substrate, and image display apparatus
| February 20, 2004 |
| 7052824 | Process for thick film circuit patterning
| June 26, 2001 |
| 7049052 | Method providing an improved bi-layer photoresist pattern
| May 9, 2003 |
| 7049051 | Process for forming and acoustically connecting structures on a substrate
| January 23, 2003 |
| 7045277 | Semiconductor processing methods of transferring patterns from patterned photoresists to materials, and structures comprising silicon nitride
| May 30, 2002 |
| 7041434 | Technique for enhancing accuracy of critical dimensions of a gate electrode by using characteristics of an ARC layer
| March 30, 2004 |
| 7041433 | Flat coil and lithographic method for producing microcomponents
| November 17, 2000 |
| 7041228 | Substrate for and a process in connection with the product of structures
| April 10, 2001 |
| 7037639 | Methods of manufacturing a lithography template
| May 1, 2002 |
| 7033729 | Light absorbent agent polymer for organic anti-reflective coating and preparation method and organic anti-reflective coating composition comprising the same
| October 12, 2004 |
| 7029801 | Method of manufacturing mask for electron beam lithography and mask blank for electron beam lithography
| November 26, 2002 |
| 7029593 | Method for controlling CD during an etch process
| October 14, 2003 |
| 7026497 | Adhesive compound and method for forming photoresist pattern using the same
| January 12, 2005 |
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