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| Patent ID | Title | Date Filed |
| 7005241 | Process for making circuit board or lead frame
| April 13, 2004 |
| 7005220 | Method for structuring a lithography mask
| June 19, 2003 |
| 7005215 | Mask repair using multiple exposures
| October 28, 2002 |
| 7001698 | Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
| November 14, 2003 |
| 6998223 | Optical wavelength converting device and process for producing the same
| August 28, 2000 |
| 6998198 | Contact hole printing by packing and unpacking
| November 30, 2001 |
| 6995047 | Thin film transistor having a short channel formed by using an exposure mask with slits
| April 19, 2002 |
| 6994949 | Method for manufacturing multi-level interconnections with dual damascene process
| February 4, 2002 |
| 6994939 | Semiconductor manufacturing resolution enhancement system and method for simultaneously patterning different feature types
| October 29, 2002 |
| 6993742 | Thermal proximity effects in lithography
| August 8, 2003 |
| 6989334 | Manufacturing method of a semiconductor device
| May 15, 2003 |
| 6982022 | Formation of photopatterned ink jet nozzle plates by transfer methods
| May 21, 2003 |
| 6979604 | Method for forming pattern on substrate and method for fabricating liquid crystal display using the same
| November 28, 2003 |
| 6974659 | Method of forming a solder ball using a thermally stable resinous protective layer
| January 16, 2002 |
| 6964032 | Pitch-based subresolution assist feature design
| February 28, 2003 |
| 6962771 | Dual damascene process
| October 13, 2000 |
| 6962770 | Method of manufacturing an electroconductive film, and an apparatus including it
| September 14, 2001 |
| 6955993 | Mask and method for making the same, and method for making semiconductor device
| August 4, 2003 |
| 6936408 | Partially photoexposed positive photoresist layer blocking method for regio-selectively processing a microelectronic layer
| July 16, 2002 |
| 6935014 | Method for fabricating a thin film magnetic head
| March 15, 2002 |
| 6924087 | Polymer microneedles
| March 27, 2003 |
| 6913989 | Method of exposing a semiconductor integrated circuit including device regions and global routing region
| January 6, 2004 |
| 6911301 | Methods of forming aligned structures with radiation-sensitive material
| March 24, 2004 |
| 6905802 | Multiple exposure method for forming a patterned photoresist layer
| August 9, 2003 |
| 6902867 | Ink jet printheads and methods therefor
| October 2, 2002 |
| 6896999 | Method of exposing a semiconductor wafer in an exposer
| June 19, 2003 |
| 6884735 | Materials and methods for sublithographic patterning of gate structures in integrated circuit devices
| August 21, 2002 |
| 6881534 | Method of forming mask, method of forming patterned thin film, and method of fabricating micro device
| September 11, 2002 |
| 6881117 | Method for manufacturing bus electrodes of plasma display panel
| April 7, 2003 |
| 6879376 | Method and apparatus for exposing photoresists using programmable masks
| November 18, 2002 |
| 6878506 | Method for manufacturing semiconductor device
| March 3, 2003 |
| 6871337 | Illumination optimization for specific mask patterns
| February 22, 2002 |
| 6869750 | Structure and method for forming a multilayered structure
| April 19, 2002 |
| 6864167 | Wafer scale solder bump fabrication method and structure
| February 10, 2003 |
| 6861365 | Method and system for forming a semiconductor device
| June 28, 2002 |
| 6861205 | Three dimensional microstructures and method of making
| February 6, 2002 |
| 6861183 | Scatter dots
| November 13, 2002 |
| 6861178 | Phase shift mask, method of exposure, and method of producing semiconductor device
| May 23, 2002 |
| 6858445 | Method for adjusting the overlay of two mask planes in a photolithographic process for the production of an integrated circuit
| September 29, 2003 |
| 6852471 | Exposure control for phase shifting photolithographic masks
| October 5, 2001 |
| 6844143 | Sandwich photoresist structure in photolithographic process
| August 2, 2002 |
| 6841321 | Method and system for processing a semi-conductor device
| January 23, 2002 |
| 6832941 | Surface treatment process for fabricating a panel of an organic light emitting device
| June 16, 2003 |
| 6830875 | Forming a through hole in a photoimageable dielectric structure
| October 7, 2002 |
| 6828085 | Exposure method and device manufacturing method using the same
| September 7, 1999 |
| 6828080 | Pattern forming method and method of fabricating device
| April 23, 2002 |
| 6825122 | Method for fabricating a patterned thin film and a micro device
| December 10, 2003 |
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