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Your search returned 1187 patents.
( 430/296 in Current US Classification ) |
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| Patent ID | Title | Date Filed |
| 6974649 | Stencil mask for electron beam projection lithography and fabrication method
| July 2, 2001 |
| 6972165 | Electron beam exposure mask and electron beam exposure method using the same
| June 16, 2003 |
| 6969571 | Exposure method using complementary divided mask, exposure apparatus, semiconductor device, and method of producing the same
| July 28, 2003 |
| 6966259 | Printing sleeve with an integrated printing surface
| January 9, 2004 |
| 6964832 | Semiconductor device and manufacturing method thereof
| February 27, 2003 |
| 6953644 | Method for compensating for scatter/reflection effects in particle beam lithography
| April 7, 2003 |
| 6953643 | Mask shaping using temporal and spatial coherence in ultra high resolution lithography
| January 8, 2002 |
| 6949329 | Pattern formation method
| June 11, 2002 |
| 6949320 | Preparation method of exposure original plate
| April 22, 2003 |
| 6946668 | Electron beam lithography device and drawing method using electron beams
| September 16, 2002 |
| 6946236 | Negative resist process with simultaneous development and aromatization of resist structures
| July 1, 2002 |
| 6941008 | Pattern forming method
| April 7, 2003 |
| 6929896 | Onium salts and the use therof as latent acids
| May 21, 2003 |
| 6929892 | Method of monitoring an exposure process
| July 20, 2004 |
| 6924084 | Electron exposure to reduce line edge roughness
| March 31, 2003 |
| 6924083 | Mask layout and exposing method for reducing diffraction effects by using a single mask in the process of semiconductor production
| October 18, 2002 |
| 6924078 | Photoresist monomers, polymers and photoresist compositions for preventing acid diffusion
| August 22, 2002 |
| 6921499 | Master carrier for magnetic transfer
| July 11, 2002 |
| 6920368 | Method and device for correcting proximity effects
| July 16, 2001 |
| 6919164 | Patterning compositions using E-beam lithography and structures and devices made thereby
| June 7, 2002 |
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