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Your search returned 351 patents.
( 382/144 in Current US Classification ) |
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| Patent ID | Title | Date Filed |
| 6947587 | Defect inspection method and apparatus
| April 20, 1999 |
| 6944561 | Method for detection of manufacture defects
| December 27, 2003 |
| 6941007 | Pattern recognition with the use of multiple images
| January 28, 2000 |
| 6940527 | Inspection status display method
| March 13, 2003 |
| 6934929 | Method for improving OPC modeling
| January 13, 2003 |
| 6934410 | Mask correction for photolithographic processes
| June 12, 2001 |
| 6931301 | System processing time computation method computation device, and recording medium with computation program recorded thereon
| July 26, 2002 |
| 6928184 | Instrument and method for metrology
| June 8, 2001 |
| 6925629 | Reticle fabrication method
| September 2, 2003 |
| 6920249 | Method and measuring instrument for determining the position of an edge of a pattern element on a substrate
| September 24, 2001 |
| 6902855 | Qualifying patterns, patterning processes, or patterning apparatus in the fabrication of microlithographic patterns
| August 2, 2002 |
| 6898781 | Method for modifying a chip layout to minimize within-die CD variations caused by flare variations in EUV lithography
| July 30, 2003 |
| 6898779 | Pattern generation on a semiconductor surface
| August 28, 2002 |
| 6892375 | Data processing method and apparatus, reticle mask, exposing method and apparatus, and recording medium
| October 29, 2002 |
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