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Your search returned 455 patents.
( 378/35 in Current US Classification ) |
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| Patent ID | Title | Date Filed |
| 6658641 | Method for mask data verification and computer readable record medium recording the verification program
| October 17, 2001 |
| 6657208 | Method of forming optical images, mask for use in this method, method of manufacturing a device using this method, and apparatus for carrying out this method
| June 21, 2001 |
| 6653644 | Pattern exposure method and apparatus
| June 23, 2000 |
| 6647543 | Method for manufacturing a pair of complementary masks
| February 27, 2002 |
| 6647137 | Characterizing kernel function in photolithography based on photoresist pattern
| July 10, 2000 |
| 6647087 | Exposure method
| October 18, 2001 |
| 6637273 | Methods and apparatus for measuring stress of membrane regions of segmented microlithographic mask blanks
| November 29, 2001 |
| 6635391 | Method for fabricating reticles for EUV lithography without the use of a patterned absorber
| December 28, 2000 |
| 6616051 | Apparatus for and method for marking objects, objects marked thereby and apparatus and method of reading marked objects
| June 28, 2000 |
| 6610446 | Information storage on masks for microlithographic tools
| January 26, 2001 |
| 6605392 | X-ray mask structure, and X-ray exposure method and apparatus using the same
| June 18, 1999 |
| 6597757 | Marking apparatus used in a process for producing multi-layered printed circuit board
| October 8, 2002 |
| 6593041 | Damascene extreme ultraviolet lithography (EUVL) photomask and method of making
| July 31, 2001 |
| 6593037 | EUV mask or reticle having reduced reflections
| May 2, 2001 |
| 6578190 | Process window based optical proximity correction of lithographic images
| January 11, 2001 |
| 6577443 | Reduction objective for extreme ultraviolet lithography
| June 11, 2001 |
| 6576380 | Extreme ultraviolet soft x-ray projection lithographic method and mask devices
| September 13, 2002 |
| 6569577 | Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devices
| November 3, 2000 |
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