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| Patent ID | Title | Date Filed |
| 6775009 | Differential interferometric scanning near-field confocal microscopy
| July 27, 2001 |
| 6775006 | Height scanning interferometry method and apparatus including phase gap analysis
| November 2, 2001 |
| 6765680 | Methods of testing and manufacturing micro-electrical mechanical mirrors
| June 21, 2002 |
| 6710888 | Method of measuring dishing
| May 23, 2000 |
| 6690473 | Integrated surface metrology
| February 1, 2000 |
| 6667809 | Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation
| July 27, 2001 |
| 6657733 | Method and apparatus for detecting ultrasonic surface displacements using post-collection optical amplification
| October 12, 1999 |
| 6643025 | Microinterferometer for distance measurements
| March 29, 2002 |
| 6624894 | Scanning interferometry with reference signal
| June 25, 2001 |
| 6624893 | Correction of scanning errors in interferometric profiling
| June 6, 2001 |
| 6600565 | Real-time evaluation of stress fields and properties in line features formed on substrates
| April 27, 2000 |
| 6577400 | Interferometer
| March 5, 2001 |
| 6552805 | Control of position and orientation of sub-wavelength aperture array in near-field microscopy
| July 27, 2001 |
| 6529278 | Optical interference apparatus and position detection apparatus
| December 27, 2000 |
| 6525824 | Dual beam optical interferometer
| June 29, 2000 |
| 6504615 | Optical instrument for measuring shape of wafer
| November 8, 1999 |
| 6493093 | Bat-wing attenuation in white-light interferometry
| April 12, 2001 |
| 6493065 | Alignment system and alignment method in exposure apparatus
| May 30, 2001 |
| 6486955 | Shape measuring method and shape measuring device, position control method, stage device, exposure apparatus and method for producing exposure apparatus, and device and method for manufacturing device
| April 16, 2001 |
| 6466308 | Method for measuring a thermal expansion coefficient of a thin film by using phase shifting interferometry
| April 12, 2000 |
| 6400458 | Interferometric method for endpointing plasma etch processes
| September 30, 1999 |
| 6392752 | Phase-measuring microlens microscopy
| June 12, 2000 |
| 6330065 | Gas insensitive interferometric apparatus and methods
| April 28, 1999 |
| 6301009 | In-situ metrology system and method
| December 1, 1997 |
| 6297884 | Interferometric instrument provided with an arrangement for producing a frequency shift between two interfering beam components
| May 22, 1998 |
| 6252669 | Interferometric instrument provided with an arrangement for producing a frequency shift between two interfering beam components
| May 22, 1998 |
| 6243169 | Interferometric instrument provided with an arrangement for periodically changing a light path of a received beam component
| May 26, 1998 |
| 6229617 | High resolution non-contact interior profilometer
| February 4, 1999 |
| 6215555 | Method and apparatus for measuring endface surface topography of multi-fiber fiberoptic connectors
| January 7, 1999 |
| 6195168 | Infrared scanning interferometry apparatus and method
| February 25, 2000 |
| 6195163 | Reflectance method for evaluating the surface characteristics of opaque materials
| October 19, 1998 |
| 6191862 | Methods and apparatus for high speed longitudinal scanning in imaging systems
| January 20, 1999 |
| 6188485 | Disk-mount device for automatic successive testing of computer-drive disk blanks by interferometry
| April 14, 1999 |
| 6185315 | Method of combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite map
| September 15, 1998 |
| 6184994 | Method and apparatus for absolutely measuring flat and sperical surfaces with high spatal resolution
| October 20, 1999 |
| 6181430 | Optical device for measuring a surface characteristic of an object by multi-color interferometry
| March 15, 1999 |
| 6175669 | Optical coherence domain reflectometry guidewire
| March 30, 1998 |
| 6175421 | Method and apparatus for measuring material properties using transient-grating spectroscopy
| May 25, 1999 |
| 6167353 | Computer method and apparatus for interacting with a physical system
| February 2, 1998 |
| 6151115 | Phase-shifting point diffraction interferometer focus-aid enhanced mask
| July 26, 1999 |
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