| 1 2 3 4 |
| Patent ID | Title | Date Filed |
| 7084970 | Inspection of TFT LCD panels using on-demand automated optical inspection sub-system
| May 14, 2004 |
| 7084969 | Method of optimizing focus of optical inspection apparatus and method and apparatus of detecting defects using the same
| March 12, 2004 |
| 7079238 | Sample inspection system
| May 13, 2003 |
| 7075059 | Image enhancement by sub-pixel imaging
| September 11, 2003 |
| 7068834 | Inspecting method, inspecting system, and method for manufacturing electronic devices
| December 1, 1999 |
| 7065239 | Automated repetitive array microstructure defect inspection
| October 24, 2001 |
| 7064822 | Evaluating a multi-layered structure for voids
| April 25, 2005 |
| 7064821 | Sample inspection system
| July 24, 2003 |
| 7061603 | Method for inspecting exposure apparatus
| March 23, 2004 |
| 7061601 | System and method for double sided optical inspection of thin film disks or wafers
| January 8, 2004 |
| 7061598 | Darkfield inspection system having photodetector array
| December 9, 2002 |
| 7053999 | Method and system for detecting defects
| March 21, 2002 |
| 7046355 | Dual stage defect region identification and defect detection method and apparatus
| January 28, 2005 |
| 7046353 | Surface inspection system
| September 23, 2002 |
| 7046352 | Surface inspection system and method using summed light analysis of an inspection surface
| December 19, 2002 |
| 7043109 | Method of in-wafer testing of monolithic photonic integrated circuits (PICs) formed in a semiconductor wafer
| October 3, 2005 |
| 7042577 | Architectures for high-resolution photomask phase metrology
| July 15, 2003 |
| 7041998 | Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
| March 24, 2003 |
| 7038773 | Apparatus and methods for enabling robust separation between signals of interest and noise
| May 18, 2004 |
| 7038772 | System and methods for classifying anomalies of sample surfaces
| July 3, 2003 |
| 7030957 | Monitoring apparatus and method particularly useful in photolithographically processing substrates
| January 26, 2004 |
| 7027634 | Range adaptable system for determining the angular position and distance of a radiating point source and method of employing
| February 13, 2002 |
| 7023541 | Device inspecting for defect on semiconductor wafer surface
| March 13, 2003 |
| 7019850 | Method and system for thin film characterization
| September 30, 2002 |
| 7019826 | Optical inspection system, apparatus and method for reconstructing three-dimensional images for printed circuit board and electronics manufacturing inspection
| March 20, 2003 |
| 7016031 | System and methods for classifying anomalies of sample surfaces
| March 1, 2004 |
| 7012672 | Lithographic apparatus, system, method, computer program, and apparatus for height map analysis
| March 10, 2004 |
| 7009696 | Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool
| January 16, 2004 |
| 7003430 | Method and system for processing commonality of semiconductor devices
| June 29, 2004 |
| 6999164 | Measurement system cluster
| April 24, 2002 |
| 6998630 | Method and its apparatus for inspecting particles or defects of a semiconductor device
| September 3, 2004 |
| 6990225 | Inspection method of photo mask for use in manufacturing semiconductor device
| April 25, 2002 |
| 6985228 | Multiple beam ellipsometer
| July 16, 2004 |
| 6975391 | Method and apparatus for non-destructive testing
| July 25, 2001 |
| 6970287 | Confocal 3D inspection system and process
| July 16, 2002 |
| 6970238 | System for inspecting the surfaces of objects
| March 11, 2003 |
| 6968079 | Investigation device and investigation method
| June 25, 2001 |
| 6963394 | Inspecting device for semiconductor wafer
| November 26, 2003 |
| 6963393 | Measurement of lateral diffusion of diffused layers
| September 23, 2002 |
| 6956644 | Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
| June 26, 2001 |
| 6952491 | Optical inspection apparatus for substrate defect detection
| January 19, 2001 |
| 6943364 | Multi-functioned wafer aligner
| February 26, 2002 |
| 6937916 | Automatic recognition of locator die in partial wafermap process
| May 28, 2003 |
| 6936835 | Method and its apparatus for inspecting particles or defects of a semiconductor device
| August 29, 2002 |
| 6934920 | Specimen analyzing method
| July 17, 2002 |
| 6934019 | Confocal wafer-inspection system
| April 7, 2004 |
| 6927847 | Method and apparatus for inspecting pattern defects
| August 15, 2002 |
| 6925202 | System and method of providing mask quality control
| March 20, 2001 |
| 6924891 | Method and apparatus for article inspection including speckle reduction
| April 29, 2004 |
| 6919957 | Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen
| September 20, 2001 |
| 6917420 | Rotational stage with vertical axis adjustment
| June 8, 2004 |
| 6917419 | Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen
| September 20, 2001 |
| 6915565 | Method of detecting position of rotation axis of suction nozzle
| January 10, 2002 |
| 6909798 | Method of erasing repeated patterns and pattern defect inspection device
| July 31, 2000 |
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