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Your search returned 1136 patents. ( 250/492.3 in Current US Classification ) |
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| Patent ID | Title | Date Filed |
| 7199383 | Method for reducing particles during ion implantation
| August 25, 2005 |
| 7199382 | Patient alignment system with external measurement and object coordination for radiation therapy system
| August 12, 2004 |
| 7195936 | Thin film processing method and system
| December 29, 2003 |
| 7193227 | Ion beam therapy system and its couch positioning method
| January 24, 2005 |
| 7193221 | Electronic optical lens barrel and production method therefor
| June 10, 2003 |
| 7189981 | Electromagnetic focusing method for electron-beam lithography system
| August 17, 2005 |
| 7189980 | Methods and systems for optimizing ion implantation uniformity control
| December 18, 2003 |
| 7183564 | Channel spark source for generating a stable focused electron beam
| August 11, 2004 |
| 7183563 | Irradiation apparatus
| March 8, 2004 |
| 7173265 | Modular patient support system
| August 12, 2004 |
| 7173264 | Particle beam therapy system
| March 3, 2004 |
| 7173262 | Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method
| June 23, 2005 |
| 7173261 | Image noise removing method in FIB/SEM complex apparatus
| February 16, 2005 |
| 7166854 | Uniformity control multiple tilt axes, rotating wafer and variable scan velocity
| December 23, 2004 |
| 7166852 | Treatment target positioning system
| June 30, 2004 |
| 7164139 | Wien filter with reduced chromatic aberration
| February 1, 2005 |
| 7161161 | Uniformity control using multiple fixed wafer orientations and variable scan velocity
| December 8, 2004 |
| 7161159 | Dual beam system
| July 13, 2004 |
| 7160475 | Fabrication of three dimensional structures
| November 21, 2002 |
| 7154108 | Particle therapy system
| May 13, 2005 |
| 7154107 | Particle beam irradiation system and method of adjusting irradiation field forming apparatus
| March 28, 2005 |
| 7154106 | Composite system of scanning electron microscope and focused ion beam
| February 16, 2005 |
| 7148613 | Source for energetic electrons
| April 13, 2004 |
| 7148478 | Electrical measurements in samples
| November 15, 2004 |
| 7145157 | Kinematic ion implanter electrode mounting
| October 17, 2003 |
| 7145156 | Image processing method, image processing apparatus and semiconductor manufacturing method
| February 11, 2005 |
| 7145155 | Process for electron sterilization of a container
| March 5, 2003 |
| 7144520 | Etching method and apparatus
| November 8, 2002 |
| 7141810 | Particle beam irradiation system
| August 18, 2005 |
| 7139009 | Ion printer
| November 2, 2004 |
| 7138641 | Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system
| May 31, 2005 |
| 7138629 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus
| January 12, 2004 |
| 7135123 | Method and system for integrated circuit backside navigation
| January 14, 2004 |
| 7132673 | Device and method for milling of material using ions
| July 30, 2004 |
| 7132672 | Faraday dose and uniformity monitor for plasma based ion implantation
| April 2, 2004 |
| 7132222 | Magnetic etching process, especially for magnetic or magnetooptic recording
| April 14, 2004 |
| 7126141 | Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method
| June 29, 2005 |
| 7122811 | Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method
| September 28, 2005 |
| 7122810 | Method for manufacturing endo-osseous implants or medical prosthesis by ionic implantation technique
| April 11, 2002 |
| 7119348 | Charged beam writing apparatus and writing method
| October 26, 2004 |
| 7119346 | Lithographic apparatus and device manufacturing method
| November 12, 2004 |
| 7112804 | Ion implantation ion source, system and method
| July 8, 2004 |
| 7109502 | Device for irradiating a target with a hadron-charged beam, use in hadrontherapy
| June 30, 2003 |
| 7105845 | Liquid crystal alignment using electron beam exposure
| July 2, 2004 |
| 7105843 | Method and system for controlling focused ion beam alignment with a sample
| May 27, 2005 |
| 7105839 | Method and fine-control collimator for accurate collimation and precise parallel alignment of scanned ion beams
| March 24, 2004 |
| 7102144 | Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method
| May 11, 2004 |
| 7102127 | Mechanized retractable pellicles and methods of use
| January 13, 2004 |
| 7098468 | Raster frame beam system for electron beam lithography
| September 11, 2003 |
| 7091504 | Electron beam exposure system
| May 12, 2005 |
| 7091484 | Method and apparatus for crystal analysis
| November 12, 2004 |
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