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Your search returned 1136 patents.
( 250/492.3 in Current US Classification )
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Patent IDTitleDate Filed
7199383 Method for reducing particles during ion implantation August 25, 2005
7199382 Patient alignment system with external measurement and object coordination for radiation therapy system August 12, 2004
7195936 Thin film processing method and system December 29, 2003
7193227 Ion beam therapy system and its couch positioning method January 24, 2005
7193221 Electronic optical lens barrel and production method therefor June 10, 2003
7189981 Electromagnetic focusing method for electron-beam lithography system August 17, 2005
7189980 Methods and systems for optimizing ion implantation uniformity control December 18, 2003
7183564 Channel spark source for generating a stable focused electron beam August 11, 2004
7183563 Irradiation apparatus March 8, 2004
7173265 Modular patient support system August 12, 2004
7173264 Particle beam therapy system March 3, 2004
7173262 Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method June 23, 2005
7173261 Image noise removing method in FIB/SEM complex apparatus February 16, 2005
7166854 Uniformity control multiple tilt axes, rotating wafer and variable scan velocity December 23, 2004
7166852 Treatment target positioning system June 30, 2004
7164139 Wien filter with reduced chromatic aberration February 1, 2005
7161161 Uniformity control using multiple fixed wafer orientations and variable scan velocity December 8, 2004
7161159 Dual beam system July 13, 2004
7160475 Fabrication of three dimensional structures November 21, 2002
7154108 Particle therapy system May 13, 2005
7154107 Particle beam irradiation system and method of adjusting irradiation field forming apparatus March 28, 2005
7154106 Composite system of scanning electron microscope and focused ion beam February 16, 2005
7148613 Source for energetic electrons April 13, 2004
7148478 Electrical measurements in samples November 15, 2004
7145157 Kinematic ion implanter electrode mounting October 17, 2003
7145156 Image processing method, image processing apparatus and semiconductor manufacturing method February 11, 2005
7145155 Process for electron sterilization of a container March 5, 2003
7144520 Etching method and apparatus November 8, 2002
7141810 Particle beam irradiation system August 18, 2005
7139009 Ion printer November 2, 2004
7138641 Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system May 31, 2005
7138629 Testing apparatus using charged particles and device manufacturing method using the testing apparatus January 12, 2004
7135123 Method and system for integrated circuit backside navigation January 14, 2004
7132673 Device and method for milling of material using ions July 30, 2004
7132672 Faraday dose and uniformity monitor for plasma based ion implantation April 2, 2004
7132222 Magnetic etching process, especially for magnetic or magnetooptic recording April 14, 2004
7126141 Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method June 29, 2005
7122811 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method September 28, 2005
7122810 Method for manufacturing endo-osseous implants or medical prosthesis by ionic implantation technique April 11, 2002
7119348 Charged beam writing apparatus and writing method October 26, 2004
7119346 Lithographic apparatus and device manufacturing method November 12, 2004
7112804 Ion implantation ion source, system and method July 8, 2004
7109502 Device for irradiating a target with a hadron-charged beam, use in hadrontherapy June 30, 2003
7105845 Liquid crystal alignment using electron beam exposure July 2, 2004
7105843 Method and system for controlling focused ion beam alignment with a sample May 27, 2005
7105839 Method and fine-control collimator for accurate collimation and precise parallel alignment of scanned ion beams March 24, 2004
7102144 Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method May 11, 2004
7102127 Mechanized retractable pellicles and methods of use January 13, 2004
7098468 Raster frame beam system for electron beam lithography September 11, 2003
7091504 Electron beam exposure system May 12, 2005
7091484 Method and apparatus for crystal analysis November 12, 2004
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