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| Patent ID | Title | Date Filed |
| 7202487 | Apparatus for ion implantation
| August 17, 2005 |
| 7201824 | Hybrid optical multi-axis beam steering apparatus
| August 16, 2002 |
| 7199383 | Method for reducing particles during ion implantation
| August 25, 2005 |
| 7199365 | Electron beam apparatus with aberration corrector
| September 8, 2005 |
| 7197178 | Photoresist edge bead removal measurement
| July 14, 2004 |
| 7196841 | Lighting system, particularly for use in extreme ultraviolet (EUV) lithography
| April 8, 2003 |
| 7196536 | Method and apparatus for non-contact electrical probe
| August 2, 2004 |
| 7193682 | Exposure apparatus and device manufacturing method
| December 22, 2004 |
| 7190435 | Pattern writing apparatus and pattern writing method
| April 1, 2004 |
| 7189981 | Electromagnetic focusing method for electron-beam lithography system
| August 17, 2005 |
| 7189980 | Methods and systems for optimizing ion implantation uniformity control
| December 18, 2003 |
| 7189979 | Electron gun
| April 13, 2004 |
| 7186977 | Method for non-destructive trench depth measurement using electron beam source and X-ray detection
| January 14, 2005 |
| 7184128 | Lithographic apparatus and device manufacturing method
| June 25, 2004 |
| 7177008 | Exposure apparatus and method
| June 30, 2004 |
| 7176545 | Apparatus and methods for maskless pattern generation
| January 27, 2004 |
| 7173262 | Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method
| June 23, 2005 |
| 7173252 | Ionizer and method for gas-cluster ion-beam formation
| October 25, 2005 |
| 7170586 | Lithographic apparatus and device manufacturing method
| January 20, 2006 |
| 7166854 | Uniformity control multiple tilt axes, rotating wafer and variable scan velocity
| December 23, 2004 |
| 7164142 | Electrical feed-through structure and method
| February 8, 2002 |
| 7161161 | Uniformity control using multiple fixed wafer orientations and variable scan velocity
| December 8, 2004 |
| 7160742 | Methods for integrated implant monitoring
| July 19, 2004 |
| 7154105 | Method of exposing using electron beam
| February 25, 2005 |
| 7148949 | Lithographic apparatus and device manufacturing method
| September 11, 2003 |
| 7148496 | System and method for proximity effect correction in imaging systems
| April 13, 2004 |
| 7148495 | Illumination system, particularly for EUV lithography
| January 6, 2004 |
| 7148478 | Electrical measurements in samples
| November 15, 2004 |
| 7145157 | Kinematic ion implanter electrode mounting
| October 17, 2003 |
| 7145156 | Image processing method, image processing apparatus and semiconductor manufacturing method
| February 11, 2005 |
| 7141808 | Device and method for maskless AFM microlithography
| March 14, 2003 |
| 7138641 | Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system
| May 31, 2005 |
| 7138629 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus
| January 12, 2004 |
| 7136148 | Lithographic apparatus and device manufacturing method
| December 23, 2004 |
| 7135693 | Method and apparatus for recycling gases used in a lithography tool
| June 29, 2005 |
| 7135692 | Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation
| December 4, 2003 |
| 7132673 | Device and method for milling of material using ions
| July 30, 2004 |
| 7132222 | Magnetic etching process, especially for magnetic or magnetooptic recording
| April 14, 2004 |
| 7129502 | Apparatus for generating a plurality of beamlets
| March 10, 2004 |
| 7126141 | Electrooptic system array, charged-particle beam exposure apparatus using the same, and device manufacturing method
| June 29, 2005 |
| 7124651 | Method of accelerated testing of illuminated device components
| August 9, 2004 |
| 7123345 | Automatic focusing apparatus
| July 23, 2004 |
| 7122816 | Method and apparatus for EUV light source target material handling
| March 23, 2005 |
| 7119877 | Exposure apparatus including a non-contact utilities transfer assembly
| November 30, 2004 |
| 7119346 | Lithographic apparatus and device manufacturing method
| November 12, 2004 |
| 7115886 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby
| October 27, 2004 |
| 7115863 | Probe for scanning probe lithography and making method thereof
| July 13, 2000 |
| 7113256 | Lithographic apparatus and device manufacturing method with feed-forward focus control
| February 18, 2004 |
| 7110504 | Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method
| May 19, 2005 |
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