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| Patent ID | Title | Date Filed |
| 7180071 | Integrated circuit having radiation sensor arrangement
| September 28, 2004 |
| 7173686 | Offner imaging system with reduced-diameter reflectors
| September 2, 2004 |
| 7173261 | Image noise removing method in FIB/SEM complex apparatus
| February 16, 2005 |
| 7173260 | Removing byproducts of physical and chemical reactions in an ion implanter
| December 22, 2004 |
| 7173252 | Ionizer and method for gas-cluster ion-beam formation
| October 25, 2005 |
| 7167232 | Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus
| December 30, 2003 |
| 7160475 | Fabrication of three dimensional structures
| November 21, 2002 |
| 7154105 | Method of exposing using electron beam
| February 25, 2005 |
| 7154103 | Method of providing extended shelf life fresh meat products
| July 22, 2003 |
| 7154090 | Method for controlling charged particle beam, and charged particle beam apparatus
| May 12, 2005 |
| 7151588 | Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatus
| September 2, 2004 |
| 7151271 | System and method for passing high energy particles through a mask
| October 8, 2003 |
| 7150806 | Spiral-shaped lamp for UV curing of coatings and bonding for a digital versatile disk (DVD) or compact disk (CD)
| January 11, 2002 |
| 7148949 | Lithographic apparatus and device manufacturing method
| September 11, 2003 |
| 7148494 | Level sensor, lithographic apparatus and device manufacturing method
| December 29, 2004 |
| 7145632 | Cooling apparatus
| September 23, 2005 |
| 7145155 | Process for electron sterilization of a container
| March 5, 2003 |
| 7141809 | Method for reciprocating a workpiece through an ion beam
| April 5, 2005 |
| 7141807 | Nanowire capillaries for mass spectrometry
| October 22, 2004 |
| 7138641 | Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system
| May 31, 2005 |
| 7138629 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus
| January 12, 2004 |
| 7135693 | Method and apparatus for recycling gases used in a lithography tool
| June 29, 2005 |
| 7135692 | Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation
| December 4, 2003 |
| 7135691 | Reciprocating drive for scanning a workpiece through an ion beam
| April 5, 2005 |
| 7133140 | Apparatus and measurement procedure for the fast, quantitative, non-contact topographic investigation of semiconductor wafers and other mirror like surfaces
| April 1, 2004 |
| 7132674 | Collimator for high-energy radiation and program for controlling said collimator
| October 23, 2002 |
| 7129506 | Optically detectable security feature
| April 12, 2004 |
| 7129484 | Method for pattern recognition in energized charge particle beam wafer/slider inspection/measurement systems in presence of electrical charge
| January 21, 2004 |
| 7126137 | Illumination system with field mirrors for producing uniform scanning energy
| April 20, 2004 |
| 7124651 | Method of accelerated testing of illuminated device components
| August 9, 2004 |
| 7122809 | Charged beam writing method and writing tool
| December 2, 2004 |
| 7119877 | Exposure apparatus including a non-contact utilities transfer assembly
| November 30, 2004 |
| 7117063 | Sorting a group of integrated circuit devices for those devices requiring special testing
| September 29, 2005 |
| 7109501 | Charged particle beam lithography system, pattern drawing method, and method of manufacturing semiconductor device
| October 7, 2004 |
| 7109498 | Radiation source, lithographic apparatus, and device manufacturing method
| September 30, 2004 |
| 7105845 | Liquid crystal alignment using electron beam exposure
| July 2, 2004 |
| 7105837 | Lithographic apparatus, device manufacturing method and radiation system
| May 13, 2004 |
| 7102146 | Dose cup located near bend in final energy filter of serial implanter for closed loop dose control
| June 3, 2004 |
| 7102145 | System and method for improving spatial resolution of electron holography
| October 25, 2004 |
| 7102144 | Particle beam irradiation apparatus, treatment planning unit, and particle beam irradiation method
| May 11, 2004 |
| 7098465 | Integrated inert gas for electromagnetic energy spot curing system
| June 25, 2004 |
| 7095036 | Electron beam lithography apparatus using a patterned emitter and method of fabricating the patterned emitter
| March 10, 2004 |
| 7095035 | Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure a | December 23, 2003 |
| 7094451 | Chemical functionalization of material surfaces using optical energy and chemicals
| November 7, 2002 |
| 7094312 | Focused particle beam systems and methods using a tilt column
| April 29, 2002 |
| 7092068 | Reticle, exposure monitoring method, exposure method and manufacturing method for semiconductor device
| November 26, 2003 |
| 7091507 | Light generator and exposure apparatus
| February 17, 2005 |
| 7091484 | Method and apparatus for crystal analysis
| November 12, 2004 |
| 7087913 | Ion implanter electrodes
| October 29, 2003 |
| 7087912 | Ion beam irradiation apparatus for suppressing charge up of substrate and method for the same
| December 3, 2002 |
| 7084414 | Charged particle beamlet exposure system
| May 27, 2004 |
| 7084411 | Pattern-definition device for maskless particle-beam exposure apparatus
| October 27, 2004 |
| 7078716 | Large area electron source
| January 27, 2004 |
| 7078715 | Lithographic apparatus and apparatus adjustment method
| August 11, 2004 |
| 7078712 | In-situ monitoring on an ion implanter
| March 18, 2004 |
| 7067829 | Power sag detection and control in ion implanting system
| November 23, 2004 |
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