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| Patent ID | Title | Date Filed |
| 7210339 | Adhesive compositions and method for selection thereof
| March 8, 2004 |
| 7209596 | Method of precision calibration of a microscope and the like
| October 15, 2004 |
| 7208730 | Programmable molecular manipulating devices
| October 14, 2004 |
| 7207119 | Controller
| December 8, 2005 |
| 7205558 | Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object
| January 20, 2006 |
| 7205555 | Defect inspection apparatus and defect inspection method
| January 24, 2005 |
| 7205542 | Scanning electron microscope with curved axes
| January 31, 2006 |
| 7205541 | Charged particle beam apparatus
| December 19, 2005 |
| 7205540 | Electron beam apparatus and device manufacturing method using same
| November 1, 2005 |
| 7199365 | Electron beam apparatus with aberration corrector
| September 8, 2005 |
| 7196328 | Nanomachining method and apparatus
| March 7, 2002 |
| 7196321 | Fine pattern forming apparatus and fine pattern inspecting apparatus
| June 7, 2005 |
| 7191092 | Methods and systems for controlling motion of and tracking a mechanically unattached probe
| May 25, 2006 |
| 7189969 | Methods and systems for controlling motion of and tracking a mechanically unattached probe
| May 25, 2006 |
| 7188049 | System and method for controlling manufacturing processes, and method for manufacturing a semiconductor device
| March 23, 2005 |
| 7186977 | Method for non-destructive trench depth measurement using electron beam source and X-ray detection
| January 14, 2005 |
| 7183548 | Apparatus for modifying and measuring diamond and other workpiece surfaces with nanoscale precision
| February 25, 2005 |
| 7183546 | System and method for voltage contrast analysis of a wafer
| September 16, 2004 |
| 7176459 | Electron beam apparatus
| November 30, 2004 |
| 7176458 | Method and apparatus for specimen fabrication
| June 14, 2006 |
| 7176457 | MEMS differential actuated nano probe and method for fabrication
| September 6, 2005 |
| 7176450 | Long travel near-field scanning optical microscope
| January 3, 2005 |
| 7170842 | Methods for conducting current between a scanned-probe and storage medium
| February 15, 2001 |
| 7170055 | Nanotube arrangements and methods therefor
| August 18, 2005 |
| 7170054 | Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder
| August 8, 2005 |
| 7170048 | Compound scanning probe microscope
| June 1, 2005 |
| 7166840 | Method for determining depression/protrusion of sample and charged particle beam apparatus therefor
| February 14, 2005 |
| 7166839 | Apparatus for measuring a three-dimensional shape
| December 30, 2005 |
| 7164128 | Method and apparatus for observing a specimen
| November 24, 2004 |
| 7164127 | Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same
| November 16, 2004 |
| 7164126 | Method of forming a sample image and charged particle beam apparatus
| February 6, 2003 |
| 7161149 | Scanning electron microscope and method of controlling same
| June 25, 2003 |
| 7161148 | Tip structures, devices on their basis, and methods for their preparation
| May 31, 2000 |
| 7157702 | High resolution atom probe
| May 26, 2004 |
| 7154092 | Method of three-dimensional image reconstruction and transmission electron microscope
| August 18, 2005 |
| 7152462 | Topography and recognition imaging atomic force microscope and method of operation
| June 14, 2005 |
| 7151257 | Tailoring domain engineered structures in ferroelectric materials
| June 1, 2004 |
| 7151256 | Vertically aligned nanostructure scanning probe microscope tips
| November 19, 2003 |
| 7150185 | Optical microcantilever
| September 24, 2004 |
| 7148498 | Externally controlled electromagnetic energy spot curing system
| June 25, 2004 |
| 7148478 | Electrical measurements in samples
| November 15, 2004 |
| 7148017 | High sensitivity mechanical resonant sensor
| November 14, 2000 |
| 7145330 | Scanning magnetic microscope having improved magnetic sensor
| August 14, 2003 |
| 7145156 | Image processing method, image processing apparatus and semiconductor manufacturing method
| February 11, 2005 |
| 7143005 | Image reconstruction method
| September 17, 2004 |
| 7141808 | Device and method for maskless AFM microlithography
| March 14, 2003 |
| 7141800 | Non-dispersive charged particle energy analyzer
| October 8, 2004 |
| 7138641 | Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system
| May 31, 2005 |
| 7138628 | Method and apparatus for specimen fabrication
| March 28, 2006 |
| 7138627 | Nanotube probe and method for manufacturing same
| June 29, 2005 |
| 7136215 | Piezoelectrically-activated cantilevered spatial light modulator
| May 18, 2005 |
| 7135678 | Charged particle guide
| July 9, 2004 |
| 7135675 | Multi-pixel and multi-column electron emission inspector
| November 5, 2003 |
| 7132640 | Wave interrogated near field array system and method for detection of subwavelength scale anomalies
| March 5, 2003 |
| 7132301 | Method and apparatus for reviewing voltage contrast defects in semiconductor wafers
| June 19, 2003 |
| 7129483 | Laser desorption and ionization mass spectrometer with quantitative reproducibility
| June 17, 2005 |
| 7126137 | Illumination system with field mirrors for producing uniform scanning energy
| April 20, 2004 |
| 7119332 | Method of fabricating probe for scanning probe microscope
| February 12, 2004 |
| 7117063 | Sorting a group of integrated circuit devices for those devices requiring special testing
| September 29, 2005 |
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