|
| | |
|
Your search returned 176 patents.
( 156/345.52 in Current US Classification ) |
|
|
| 1 2 |
| Patent ID | Title | Date Filed |
| 6733593 | Film forming device
| September 18, 2000 |
| 6733592 | High-temperature and high-pressure treatment device
| May 13, 2002 |
| 6730175 | Ceramic substrate support
| January 22, 2002 |
| 6719849 | Single-substrate-processing apparatus for semiconductor process
| May 16, 2001 |
| 6716304 | Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder
| December 3, 2002 |
| 6692576 | Wafer support system
| September 13, 2002 |
| 6692575 | Apparatus for supporting a substrate in a reaction chamber
| January 18, 2000 |
| 6689984 | Susceptor with built-in electrode and manufacturing method therefor
| October 31, 2002 |
| 6676805 | Method of holding substrate and substrate holding system
| March 28, 2002 |
| 6676804 | Method and apparatus for plasma processing
| January 2, 2001 |
| 6676759 | Wafer support device in semiconductor manufacturing device
| April 30, 2001 |
| 6669783 | High temperature electrostatic chuck
| June 28, 2001 |
| 6666949 | Uniform temperature workpiece holder
| November 20, 2000 |
| 6656286 | Pedestal with a thermally controlled platen
| February 2, 2001 |
| 6652655 | Method to isolate multi zone heater from atmosphere
| July 7, 2000 |
| 6645871 | Method of holding substrate and substrate holding system
| December 21, 2001 |
| 6645344 | Universal backplane assembly and methods
| May 18, 2001 |
| 6645304 | Susceptors for semiconductor-producing apparatuses
| October 16, 2001 |
| 6645303 | Heater/lift assembly for high temperature processing chamber
| May 5, 2000 |
| 1 2 |
|
|
|
|
|
|
|
|
|
|
|